Method for determining the coordinate distribution of local inhomogeneities in the bulk of a semiconductor
Authors
Vahabov K.I., Mirkomilova M.S., Dzhuraev U.E., Gaibov A.G.
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A method has been developed for determining the two-coordinate (x and y) distribution of localized impurity atom clusters within the bulk of semiconductor materials. The developed method is used in the preliminary selection of homogeneous materials for the production of semiconductor devices
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Authors
Vahabov K.I., Mirkomilova M.S., Dzhuraev U.E., Gaibov A.G.
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References:
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